Vacuum Installation VTT PLASMA CROM for drawing thin-film coverings
- Customer pickup,
- In detail
The vacuum VTT PLASMA CROM line is intended for drawing in vacuum of thin - film coverings of Cr on substrates from glass in the magnetron way with preliminary cleaning with an ionic source and heating.
Installation provides uniform drawing coverings not less than 0.1 thick µm on one lateral surface of a conditional plate, 127 mm by 127 mm in size in number of not less than 400 pieces for one loading.
The maximum size of a napylyaemy product - 3650 * 400 mm.
1. Internal size of a chamber: N of =460 mm, In =160mm, L = 8200 mm
2. Limit residual vacuum of 8х10 - 4 Pas in a chamber.
3. The power consumed by installation:
- in the pumping mode - 12 kW;
- in the mode of cleaning and drawing a covering - to 40 kW. (depending on quantity of at the same time used sources)
STRUCTURE OF INSTALLATION.
|No. of a payment order||Name||Quantity.|
|1.||Magnetron source with the power supply unit.
Size of a target, mm
Power supply unit
- category current, move, And
570 * 80 * 10.
- working zone, mm
- category current, And
- working tension, In
500 * 70
|3.||Industrial equipment of extended type.
Quantity of at the same time loaded products of 400 * 400 in size - 400 pieces.
|4.||Forvacuum Okta 500 / HENA 300 (PFEIFFER) unit||1|
|5.||High - vacuum otkachny the module on the basis of the diffusive pump NVDM - 400||1|
|6.||Lock high - vacuum Du 400 air - controlled and possibility of a drosselirovaniye of pumping||1|
|7.||Heaters managements with the temperature of substrate, intra chamber with an opportunity, up to 400 ˚ Page.||Two zones on 8 kW|
- PFEIFFER IKR 251
- PFEIFFER PKR 251
- PFEIFFER TPR 280
|8||System pneumatic on the basis of the SMC elements||1|
|9||System hydraulic on the basis of the SMC elements||1|
|10||System automatic supply of technological gases with a possibility of work along with 4 gases||1|
|11||Control system on the basis of the industrial controller of the German corporation WAGO Kontakttehnik GmbH.
Touch control panel (Touch screen interface)
Management manual and automatic.
Full automation of process of drawing coverings.