Vacuum Installation V-700 O ELI for drawing optical coverings
- Customer pickup,
- In detail
Vacuum installation is intended for drawing in vacuum of coverings by method of electron beam, magnetron and resistive evaporation of various materials with preliminary ionic cleaning on the basis of cryogenic pumping.
In particular now installation is used for drawing layers Auge - Au and Ni - Al on a substrate from GaAs.
- High - vacuum pumping system on the basis of the cryogenic pump.
- Management of pumping system, system pneumatic, system hydraulic - on the basis of the industrial logical controller of the German production providing high reliability, flexible change of control algorithms and replacement of control facilities.
- A workplace of the operator, installation of parameters and the modes of technological devices, control of power supply units of evaporators, a blousing of gases, system of quartz control - on the basis of the personal computer under Windows 2000/XP.
- The software of SCADA - system in the environment of Visual C + + .
- Height of a chamber is 600 mm;
- Diameter of a chamber is 640 mm;
- Frequency of rotation of industrial equipment 0.. . 20 rpm
- Loading of industrial equipment (for plates of 50 GaAs) 48 pieces;
- Maximum temperature of heating of substrates 350C;
- The power consumed by installation, no more than 25 kW.
- Limit residual vacuum of 5 * 10 - 4 Pas.
STRUCTURE OF INSTALLATION.
No. of a
|1||High - vacuum otkachny the module on base
cryogenic pump HBK - 3,2 - A - P
|2.||NVR 25D/ND 200 forvacuum unit
(installation of pumps of the German is possible
|3.||High - vacuum lock of Du 250||1|
|4.||Vacuum chamber with a door||1|
|5.||Heaters are intra chamber||2|
|6.||Industrial equipment with replaceable
|7.||Electron beam evaporator||1|
|9.||Ionic source of etching||1|
|11.||System hydraulic (SMC)||1|
|12.||System pneumatic (SMC)||1|
|13.||System of quartz control of thickness
coverings with three sensors
|14.||Rack of management||1|
|15.||Rack of food of UELI||1|
|16.||Rack of power supply of magnetrons, source
ionic cleaning, resistive evaporator
Installation in coordination of the customer can be completed with industrial equipment under products, system of photometric control of coverings (spektrovizor), a control system with full automation of processes of drawing coverings.