Installation vacuum VTT 700 REZ
- Customer pickup,
- In detail
The vacuum VTT - 700 - REZ installation is intended for a dusting in vacuum in the magnetron way unilateral resistive (PC3710, PC5406) and metal (Cr, Ta, etc. ) thin - film layers on substrates of 60х48х1 in size * and 60х48х0,5 * to mm with the subsequent annealing at a temperature of 400 0 C.
1. Internal size of a chamber: Ø650 x 560 mm.
2. Limit residual vacuum of 5х10 - 4 Pas in a chamber.
3. The power consumed by installation:
- in the pumping mode - to 12 kW;
- in the dusting mode - to 40 kW (depending on quantity of at the same time used sources)
4. A magnetron source with the power supply unit - 4 pieces.
5. Ionic source.
6. Industrial equipment. A set - 50 pieces, the size 60х48х0,5 or 60х48х1 of mm.
7. Forvacuum WU232 unit.
8. High - vacuum otkachny the module on the basis of the diffusive pump ND - 400.
9. Lock high - vacuum DU 400.
10. Heaters managements with the temperature of substrate, intra chamber with an opportunity, up to 400 s - 4 pieces.
11. Vacuum sensors:
- PFEIFFER IKR 251
- PFEIFFER PKR 251
- PFEIFFER TPR OF 280 - 2 PIECES.
12. System pneumatic on the basis of the SMC elements
13. System hydraulic on the basis of the SMC elements
14. System automatic supply of technological gases with a possibility of work along with 4 gases
15. A control system on the basis of the industrial controller of the German corporation WAGO Kontakttehnik GmbH.
16. Management manual and automatic.
17. Remote access
18. Full automation of process of drawing coverings.