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Installation vacuum vtt plasma m3 is1 for drawing thin-film coverings of al on substrates from si in Smorgon online-store Vakuumnaya tehnika i tehnologii (VTT), OOO | Buy Installation vacuum VTT PLASMA M3 IS1 for drawing thin-film coverings of Al on substrates from Si Smorgon (Belarus) | Vakuumnaya tehnika i tehnologii (VTT), OOO : Allbiz
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Vakuumnaya tehnika i tehnologii (VTT), OOO
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Installation vacuum VTT PLASMA M3 IS1 for drawing thin-film coverings of Al on substrates from Si
  • Installation vacuum VTT PLASMA M3 IS1 for drawing thin-film coverings of Al on substrates from Si
  • Installation vacuum VTT PLASMA M3 IS1 for drawing thin-film coverings of Al on substrates from Si

Installation vacuum VTT PLASMA M3 IS1 for drawing thin-film coverings of Al on substrates from Si

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Brand:VTT
Country of manufacture:Belarus
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Description

The vacuum VTT PLASMA M3 IS1 installation for drawing in vacuum of thin-film coverings of Al on substrates from Si in the magnetron way with preliminary cleaning with an ionic source.

Installation provides uniform drawing coverings on one lateral surface of a plate, 125 mm by 125 mm in size, plate thickness 220±20µm, at simultaneous loading of 300 products.

Vacuum installation has to be operated on production sites and in laboratories at a temperature of air from 17 to 25ºС, relative humidity of air from 40 to 75% and atmospheric pressure 84,0*10 ³ - 106,0*10³pa.

Use of installation for drawing decorative coverings on products from various materials is possible.

Yours faithfully, director of the enterprise

Vasily Semenovich

ph. mob: 375 (29) 6154641

skype: vvs_12

e-mail: vactt@mail.ru

TECHNICAL CHARACTERISTICS.

1. Internal size of a chamber: D=1060 mm, H=2370.

2. Limit residual vacuum of 9х10-4 Pas in a chamber.

3. The power consumed by installation:

- in the pumping mode - 12 kW;

- in the mode of cleaning and drawing a covering - to 60 kW. (depending on quantity of at the same time used sources)

STRUCTURE OF INSTALLATION.

No. of a payment order Name Quantity.
1. Magnetron source with the power supply unit.

Size of a target, mm

Power supply unit

- category current, move, And

3 pieces.

2230*100*10.

3 pieces.

40

2. Ionic source

- working zone, mm

- category current, And

- working tension, In

1

2100*70

0.7
3000

3. Industrial equipment of drum type.

Quantity of at the same time loaded products of 125*125 mm in size (the option of industrial equipment directly under the customer's products is possible)

2 sets.

300 pieces.

4. Forvacuum Okta 500 / HENA 300 (PFEIFFER) unit 1
5. High-vacuum otkachny the module on the basis of the diffusive pump NVDM-400 1
6. Lock high-vacuum Du 400 air-controlled and possibility of a drosselirovaniye of pumping 1
7. Heaters managements with the temperature of substrate, intra chamber with an opportunity, up to 400 ˚ Page. 4
8. Vacuum sensors:

- PFEIFFER IKR 251

- PFEIFFER PKR 251

- PFEIFFER TPR 280

1

1

2

8. Control of thickness of coverings:

- Quartz controller of thickness.

- Control of resistance on a sample.

1

1

8 System pneumatic on the basis of the SMC elements 1
9 System hydraulic on the basis of the SMC elements 1
10 System automatic supply of technological gases with a possibility of work along with 4-8 gases 1
Characteristics:
Brand:VTT
Country of manufacture:Belarus
Information is up-to-date: 15.05.2019
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